000 00746 a a2200217 04500
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003 OSt
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008 150810b xxu||||| |||| 00| 0 eng d
020 _a354059129X
041 _aeng
082 0 _a621.381'52
_bB344
100 4 0 _aBauer, Günther
_99944
245 0 _aOptical characterization of epitaxial semiconductor layers /
_cGünther Bauer
260 4 _aNew York :
_bSpringer,
_c1996
300 4 _a429 p.
505 _a1. Introduction. 2. Analysis of epitaxial growth. 3. Spectroscopic ellipsometry. 4. Raman Spectroscopy. 5. Far-Infrared spectroscopy. 6. High resolution X-Ray Diffraction
650 _aSemiconductor Layers
_99945
700 4 0 _aRichter, Wolfgang.
_99946
942 _2ddc
_cLOPT
999 _c47935
_d47935